Semiconductor and thin film materials
Semiconductor and thin film materials

Semiconductor and thin film materials

Analysis of epitaxial thin films, wafer materials, strain measurement, film thickness, interface quality, crystal orientation, and advanced packaging materials.

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Typical sample

Si, SiGe, GaN, AlN, SiC, III-V semiconductors, High-k thin films, metal thin films, dielectric films, multilayer films, and advanced packaging materials.

Problems that XRD can solve

Epitaxial layer lattice mismatch, strain state, thin film orientation, texture, crystal quality, rocking curve FWHM, XRR film thickness/density/roughness analysis.

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